The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Dec. 28, 2009
Dong-sing Wuu, Taichung, TW;
Ray-hua Horng, Taichung, TW;
Chia-cheng Wu, Taichung, TW;
Po-rung Lin, Taichung, TW;
Dong-Sing Wuu, Taichung, TW;
Ray-Hua Horng, Taichung, TW;
Chia-Cheng Wu, Taichung, TW;
Po-Rung Lin, Taichung, TW;
National Chung-Hsing University, Taichung, TW;
Abstract
A semiconductor substrate includes: a base layer; a sacrificial layer that is formed on a base layer and that includes a plurality of spaced apart sacrificial film regions and a plurality of first passages each of which is defined between two adjacent ones of the sacrificial film regions. Each sacrificial film region has a plurality of nanostructures and a plurality of second passages defined among the nanostructures. The second passages communicate spatially with the first passages and have a width less than that of the first passages. An epitaxial layer is disposed on the sacrificial layer.