The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Oct. 24, 2011
Jeong Woo Hyun, Suwon-si, KR;
Jung Sub Lee, Suwon-si, KR;
Sung Jin Lee, Seongnam-si, KR;
Sang Kyu Lim, Seoul, KR;
Kwang Soo Kim, Suwon-si, KR;
Jae Kwang Lee, Yongin-Si, KR;
Jeong Woo Hyun, Suwon-si, KR;
Jung Sub Lee, Suwon-si, KR;
Sung Jin Lee, Seongnam-si, KR;
Sang Kyu Lim, Seoul, KR;
Kwang Soo Kim, Suwon-si, KR;
Jae Kwang Lee, Yongin-Si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
According to example embodiments, a laser optical system includes a laser generator, at least one scan module, an objective lens, a relay lens, a review optical system, and a control device. The laser generator is configured to generate a laser beam. The at least one scan module is configured to reflect the laser beam generated by the laser generator and to direct the laser beam in different directions. The objective lens is configured to focus the laser beam on a substrate. The relay lens is configured to guide the laser beam scanned by the at least one scan module to within an incident range of the objective lens. The review optical system is configured to monitor, in real time, repair of the substrate using the laser beam. The control device is configured to control the at least one scan module.