The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Nov. 17, 2010
Applicants:
Koki Yano, Chiba, JP;
Masayuki Itose, Chiba, JP;
Hirokazu Kawashima, Chiba, JP;
Inventors:
Assignee:
Idemitsu Kosan Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C09D 1/00 (2006.01); H01B 1/02 (2006.01); C23C 14/00 (2006.01); B32B 15/00 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); H01L 21/00 (2006.01); H01L 21/16 (2006.01); C01G 15/00 (2006.01); C04B 35/626 (2006.01); C23C 14/08 (2006.01); H01L 29/786 (2006.01); C04B 35/453 (2006.01); C01G 9/02 (2006.01); C23C 14/34 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C04B 35/453 (2013.01); C01P 2002/72 (2013.01); C01G 15/006 (2013.01); C01G 15/00 (2013.01); C04B 35/62675 (2013.01); C23C 14/08 (2013.01); H01L 21/02554 (2013.01); C04B 2235/664 (2013.01); C04B 2235/3284 (2013.01); H01L 29/7869 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/666 (2013.01); C01G 9/02 (2013.01); C04B 2235/77 (2013.01); H01L 21/02631 (2013.01); C23C 14/3414 (2013.01); C04B 2235/6565 (2013.01); H01L 21/02565 (2013.01); H01L 29/66742 (2013.01); C04B 2235/6585 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/658 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/80 (2013.01); C04B 2235/963 (2013.01);
Abstract
An oxide including indium (In), gallium (Ga) and zinc (Zn), wherein diffraction peaks are observed at positions corresponding to incident angles (2θ) of 7.0° to 8.4°, 30.6° to 32.0°, 33.8° to 35.8°, 53.5° to 56.5° and 56.5° to 59.5° in an X-ray diffraction measurement (CuKα rays), and one of diffraction peaks observed at positions corresponding to incident angles (2θ) of 30.6° to 32.0° and 33.8° to 35.8° is a main peak and the other is a sub peak.