The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Dec. 13, 2011
Gregory N. Nielson, Albuquerque, NM (US);
Eric Langlois, Albuquerque, NM (US);
Michael Baker, Albuquerque, NM (US);
Murat Okandan, Edgewood, NM (US);
Robert Anderson, Tucson, AZ (US);
Gregory N. Nielson, Albuquerque, NM (US);
Eric Langlois, Albuquerque, NM (US);
Michael Baker, Albuquerque, NM (US);
Murat Okandan, Edgewood, NM (US);
Robert Anderson, Tucson, AZ (US);
Sandia Corporation, Albuquerque, NM (US);
Abstract
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.