The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Mar. 29, 2010
Hiroto Tokoshima, Tokyo, JP;
Hideki Kobayashi, Tokyo, JP;
Hiroto Tokoshima, Tokyo, JP;
Hideki Kobayashi, Tokyo, JP;
Kurita Water Industries, Ltd., Tokyo, JP;
Abstract
An ultrapure water production facility and a method of monitoring ultrapure water include an ultrapure water production system, a first monitoring unit including a resistivity meter, a second monitoring unit including a dissolved gas concentration meter, a TOC meter, a hydrogen peroxide concentration meter, a silica meter, a boron meter, an evaporation residue meter, and a water temperature meter connected in parallel, and a third monitoring unit including a particle meter. The third monitoring unit is provided in parallel with the first monitoring unit and the first monitoring unit and the second monitoring unit are connected in series.