The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2014

Filed:

Dec. 20, 2010
Applicants:

Kohei Matsui, Tokyo, JP;

Kaoru Hatta, Tokyo, JP;

Inventors:

Kohei Matsui, Tokyo, JP;

Kaoru Hatta, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
Abstract

In an exposure method, a photomask and a substrate having a resist applied thereto are positioned so as to be opposed to a blinking light source that repeatedly emits light and emits no light. The blinking light source is caused to blink with the substrate being continuously conveyed in a direction orthogonal to a direction in which openings in the photomask are aligned, so that multiple exposures are intermittently performed. In each exposure, a speed at which the substrate is conveyed is controlled such that the openings of the photomask overlap a portion of exposed patterns having been obtained by an immediately preceding exposure, thereby obtaining colored layers which are formed into a striped-shape and extend in the direction in which the substrate is conveyed.


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