The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Jul. 26, 2010
Yasushi Kurosawa, Niigata, JP;
Yasushi Kurosawa, Niigata, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
The reaction exhaust gas from which chlorosilanes and hydrogen chloride have been removed in a hydrogen chloride absorption unit () is introduced to an adsorption unit () to recover a purified hydrogen (S). Activated carbon is packed in the adsorption unit (), the gas, which is mainly composed of hydrogen, is passed through the activated carbon-packed layer during which unseparated chlorosilanes, hydrogen chloride, nitrogen, carbon monoxide, methane, and monosilane contained in the gas are adsorbed on the activated carbon and removed from the gas, and thereby the purified hydrogen is obtained. Nitrogen, carbon monoxide, methane and monosilane are a compressed gas in the state of adsorption, whereas hydrogen chloride and chlorosilanes are a liquid in the state of adsorption, and require a vaporization heat during desorption. Using these properties, the separation of hydrogen chloride and chlorosilanes from other impurity components is possible merely by separating the pathways for the desorbed gas.