The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2014

Filed:

Jul. 27, 2006
Applicants:

Marilena Radoiu, Lyons, FR;

James Robert Smith, Taunton, GB;

Andrew James Seeley, Bristol, GB;

Inventors:

Marilena Radoiu, Lyons, FR;

James Robert Smith, Taunton, GB;

Andrew James Seeley, Bristol, GB;

Assignee:

Edwards Limited, West Sussex, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32844 (2013.01); H01J 37/32229 (2013.01); H01J 37/32192 (2013.01); Y02C 20/30 (2013.01);
Abstract

A microwave plasma reactor () comprises a reactor chamber, a microwave resonant cavity () located within the reactor chamber, a waveguide () for conveying microwave radiation to the resonant cavity, the waveguide having a convergent tapered portion, means for forming an electromagnetic standing wave within the resonant cavity from the microwave radiation for initiating and sustaining a plasma within the resonant cavity, the resonant cavity having a gas inlet and a gas outlet, and conduit means extending from the gas outlet for containing a plasma conveyed from the resonant cavity with a gas flowing from the gas inlet to the gas outlet.


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