The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Sep. 14, 2011
Satoshi Waga, Niigata-ken, JP;
Sumihito Morita, Niigata-ken, JP;
Masaru Sakurai, Niigata-ken, JP;
Masaya Yamatani, Niigata-ken, JP;
Hideki Kamimura, Niigata-ken, JP;
Satoshi Waga, Niigata-ken, JP;
Sumihito Morita, Niigata-ken, JP;
Masaru Sakurai, Niigata-ken, JP;
Masaya Yamatani, Niigata-ken, JP;
Hideki Kamimura, Niigata-ken, JP;
Alps Electric Co., Ltd., Tokyo, JP;
Abstract
A capacitive type humidity sensor is provided, where a sensor chip substrate, with a sensor section where electrostatic capacitance changes in accordance with humidity, a reference section where electrostatic capacitance does not change, and a plurality of pads which are output terminals of each section, and an IC substrate, which is electrically connected to the pads and which outputs the difference in capacitance between the sections as a voltage, are fixed to the same support substrate, where a protective member, which forms a sealed region surrounding the sensor section and which covers the reference section, is provided on the sensor chip substrate, the support substrate is covered by a sealing resin except for the region which is covered by the protective member, the sensor section is exposed to air at the region which is surrounded by the protective member, and the other constituent elements are covered by the sealing resin.