The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2014
Filed:
Dec. 15, 2008
Lei Wu, Gainesville, FL (US);
Huikai Xie, Gainesville, FL (US);
Lei Wu, Gainesville, FL (US);
Huikai Xie, Gainesville, FL (US);
Other;
Abstract
A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.