The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Dec. 29, 2010
Srini Raghavan, Tucson, AZ (US);
Rajkumar Govindarajan, Tucson, AZ (US);
Manish Keswani, Tucson, AZ (US);
Srini Raghavan, Tucson, AZ (US);
Rajkumar Govindarajan, Tucson, AZ (US);
Manish Keswani, Tucson, AZ (US);
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Abstract
A benign all-wet process for stripping photoresist after an implantation process performed to fabricate a device is provided. A method of stripping implanted resist includes a first step of disrupting a crust formed on the surface of the resist during the implantation process and then removing the underlying resist. In accordance with embodiments of the invention, a catalyzed hydrogen peroxide (CHP) chemical system is used to disrupt the crust and allow for low temperature (<180° C.) removal of the underlying resist.