The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2014

Filed:

Nov. 04, 2011
Applicants:

Shimpei Takagi, Osaka, JP;

Yusuke Yoshizumi, Itami, JP;

Koji Katayama, Osaka, JP;

Masaki Ueno, Itami, JP;

Takatoshi Ikegami, Itami, JP;

Inventors:

Shimpei Takagi, Osaka, JP;

Yusuke Yoshizumi, Itami, JP;

Koji Katayama, Osaka, JP;

Masaki Ueno, Itami, JP;

Takatoshi Ikegami, Itami, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8252 (2006.01); H01L 21/18 (2006.01); H01S 5/343 (2006.01); H01S 5/10 (2006.01); H01S 5/02 (2006.01); H01S 5/32 (2006.01); H01S 5/16 (2006.01);
U.S. Cl.
CPC ...
H01S 5/34333 (2013.01); H01S 5/1082 (2013.01); H01S 5/1085 (2013.01); H01S 5/0202 (2013.01); H01S 5/3202 (2013.01); H01S 5/16 (2013.01);
Abstract

A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate having a hexagonal III-nitride semiconductor and having a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, the laser structure including a substrate and a semiconductor region formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal III-nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.


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