The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Jul. 22, 2011
Yuji Yamada, Yokohama, JP;
Makiko Katano, Yokohama, JP;
Ayako Mizuno, Yokohama, JP;
Eri Uemura, Yokohama, JP;
Asuka Uchinuno, Yokohama, JP;
Chikashi Takeuchi, Yokohama, JP;
Yuji Yamada, Yokohama, JP;
Makiko Katano, Yokohama, JP;
Ayako Mizuno, Yokohama, JP;
Eri Uemura, Yokohama, JP;
Asuka Uchinuno, Yokohama, JP;
Chikashi Takeuchi, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A sample contamination method according to an embodiment includes spraying a chemical solution containing contaminants into a casing, carrying a semiconductor substrate into the casing filled with the chemical solution by the spraying, leaving the semiconductor substrate in the casing filled with the chemical solution for a predetermined time, and carrying the semiconductor substrate out of the casing after the predetermined time passes.