The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Feb. 26, 2010
Heung-yeol NA, Yongin, KR;
Ki-yong Lee, Yongin, KR;
Jin-wook Seo, Yongin, KR;
Min-jae Jeong, Yongin, KR;
Jong-won Hong, Yongin, KR;
Eu-gene Kang, Yongin, KR;
Seok-rak Chang, Yongin, KR;
Yun-mo Chung, Yongin, KR;
Tae-hoon Yang, Yongin, KR;
Byung-soo SO, Yongin, KR;
Byoung-keon Park, Yongin, KR;
Dong-hyun Lee, Yongin, KR;
Kil-won Lee, Yongin, KR;
Jong-ryuk Park, Yongin, KR;
Bo-kyung Choi, Yongin, KR;
Ivan Maidanchuk, Yongin, KR;
Won-bong Baek, Yongin, KR;
Jae-wan Jung, Yongin, KR;
Heung-Yeol Na, Yongin, KR;
Ki-Yong Lee, Yongin, KR;
Jin-Wook Seo, Yongin, KR;
Min-Jae Jeong, Yongin, KR;
Jong-Won Hong, Yongin, KR;
Eu-Gene Kang, Yongin, KR;
Seok-Rak Chang, Yongin, KR;
Yun-Mo Chung, Yongin, KR;
Tae-Hoon Yang, Yongin, KR;
Byung-Soo So, Yongin, KR;
Byoung-Keon Park, Yongin, KR;
Dong-Hyun Lee, Yongin, KR;
Kil-Won Lee, Yongin, KR;
Jong-Ryuk Park, Yongin, KR;
Bo-Kyung Choi, Yongin, KR;
Ivan Maidanchuk, Yongin, KR;
Won-Bong Baek, Yongin, KR;
Jae-Wan Jung, Yongin, KR;
Samsung Display Co., Ltd., Yongin, KR;
Abstract
A substrate processing apparatus that forms thin films on a plurality of substrates and thermally processes the substrates, by uniformly heating the substrates. The substrate processing apparatus includes a processing chamber, a boat in which substrates are stacked, an external heater located outside of the processing chamber, a feeder to move the boat into and out of the processing chamber, a lower heater located below the feeder, and a central heater located in the center of the boat.