The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2014

Filed:

Nov. 13, 2012
Applicant:

Agilent Technologies, Inc., Loveland, CO (US);

Inventors:

Christopher Ryan Moon, Cupertino, CA (US);

Richard K. Workman, Sunnyvale, CA (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/06 (2010.01); G01Q 10/00 (2010.01); G01Q 10/04 (2010.01); G01Q 20/00 (2010.01); G01Q 20/02 (2010.01); G01Q 60/24 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/065 (2013.01); G01Q 10/00 (2013.01); G01Q 10/04 (2013.01); G01Q 10/045 (2013.01); G01Q 20/00 (2013.01); G01Q 20/02 (2013.01); G01Q 60/24 (2013.01);
Abstract

An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance.


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