The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Mar. 15, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Takehiro Toyoda, Machida, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A solid-state imaging apparatus and a manufacturing method of a solid-state imaging apparatus are provided. Metal wiringsandare formed in an effective pixel region A and out-of effective pixel region B of a semiconductor substrate, and an etch stop layeris formed over the metal wiringsand. Moreover, an insulating filmis formed on the etch stop layer, and another metal wiringis formed on the insulating filmin the out-of effective pixel region B. Next, the insulating filmin the effective pixel region A is removed by using the etch stop layer, and interlayer lensesare formed in the step in the effective pixel region A where the insulating filmis removed.