The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Jun. 29, 2011
Applicants:
Sang Wook Park, Chungcheongnam-do, KR;
SO Jung Park, Chungcheongnam-do, KR;
Dong-chul Seo, Chungcheongnam-do, KR;
Inventors:
Sang Wook Park, Chungcheongnam-do, KR;
So Jung Park, Chungcheongnam-do, KR;
Dong-Chul Seo, Chungcheongnam-do, KR;
Assignee:
Korea Kumho Petrochemical Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/40 (2006.01); G03F 7/30 (2006.01); G03F 7/20 (2006.01); C08F 232/04 (2006.01); C08F 222/38 (2006.01);
U.S. Cl.
CPC ...
Abstract
A water-soluble resin composition for forming fine patterns comprising water-soluble polymer represented by Chemical Formula 1 as below and the first water-soluble solvent, is coated and heated on a photoresist layer having at least one contact hole to reduce a size of the at least one contact hole. (In Chemical Formula 1,