The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Oct. 05, 2007
Ichiro Nishikawa, Kyoto, JP;
Takeshi Kawano, Uji, JP;
Ichiro Nishikawa, Kyoto, JP;
Takeshi Kawano, Uji, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, JP;
Abstract
This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, that can expect reduction in risk of clogging, and that can increase vaporization flow easily. The vaporizer comprises an inlet port for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section for vaporizing the precursor arranged on the downstream side of the inlet port, and an outlet port for delivering the precursor vaporized at the vaporizing section, wherein the vaporizing section is of a flow channel type comprising a nozzle for spraying the precursor and a heating channel arranged on the downstream side of the nozzle continuously thereto. A plurality of vaporizing sections are arranged in parallel between the inlet port and the outlet port, and arranged such that each vaporizing section can distribute the precursor independently of each other.