The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8763161 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 24, 2014

Filed:

Sep. 19, 2012
Applicant:

The National Institute of Standards and Technology, Gaithersburg, MD (US);

Inventors:

Rachel Cannara, Dickerson, MD (US);

Fred Sharifi, Poolesville, MD (US);

Zhao Deng, Gaithersburg, MD (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/10 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/10 (2013.01); Y10S 977/871 (2013.01);
Abstract

A variable temperature assembly for scanning probe microscopy (SPM) is described which minimizes or eliminates motion of the sample caused by the thermal expansion or contraction of the sample holder assembly and platform/scanning stage on which the assembly is mounted, and minimizes heating or cooling of the platform/stage. In heater form, the variable temperature assembly includes a thin boron nitride puck with one or more high-resistivity wires embedded along an underside of the puck. The puck is suspended from its polished top surface by posts that are secured to the microscope stage. All thermal expansion of the puck occurs in the downward direction, away from the SPM probe-sample interface, thus eliminating relative motion between the probe tip and sample surface. The top surface of the puck remains stationary as a result of the unique geometry of the posts and the puck-post attachment configuration described herein.


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