The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Feb. 09, 2011
Thierry Melin, Lille, FR;
Didier Theron, Roubaix, FR;
Sophie Barbet, Villeneuve D'ascq, FR;
Dominique Deresmes, Louvil, FR;
Heinrich Diesinger, Lesquin, FR;
Thierry Melin, Lille, FR;
Didier Theron, Roubaix, FR;
Sophie Barbet, Villeneuve D'ascq, FR;
Dominique Deresmes, Louvil, FR;
Heinrich Diesinger, Lesquin, FR;
Centre National de la Recherche Scientifique—CNRS, Paris, FR;
Universite des Sciences et Technologies de Lille, Villeneuve D'ascq, FR;
Abstract
During a measurement in KFM mode of the surface potential of a material (P), a detection point () is arranged above a surface (S) of the material. Two piezoelectric actuators () are used to monitor a mean distance of the detection point relative to the surface of the material and a mechanical oscillation of said point. During the measurement, a control voltage is applied between control electrodes () of the piezoelectric actuator () which is dedicated to the mechanical oscillation of the detection point (), said control voltage not having an alternative component to an angular frequency of electrical energization of said detection point. A result of the KFM measurement is therefore separate from operating parameters such as a projection angle used to perform closed-loop control and a value of the angular frequency of electrical energization. The invention thus provides absolute measurements of surface potentials.