The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Mar. 03, 2010
Yuki Oshima, Utsunomiya, JP;
Yuki Oshima, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
A measurement method of the present invention is a measurement method which measures a target divided into a plurality of partial regions to measure a whole shape of the target by stitching the plurality of partial regions. The measurement method comprises Steps Sto Swhich measures a plurality of partial regions, Step Swhich determines an error in a partial region that is a reference, Step Swhich calculates each of errors in the plurality of partial regions, and Step Swhich performs a correction depending on each of the errors to stitch the plurality of partial regions. Steps Sto Sare repeatedly performed by changing the partial region that is the reference (S).