The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Dec. 08, 2010
Michael J. Hochberg, Seattle, WA (US);
Jeremy Witzens, La Jolla, CA (US);
Michael J. Hochberg, Seattle, WA (US);
Jeremy Witzens, La Jolla, CA (US);
University of Washington through its Center for Commercialization, Seattle, WA (US);
Abstract
Methods for fabricating waveguides in conjunction with interconnect fabrication in back-ends of integrated circuits and structures thereof are disclosed. One method for forming a waveguide in accordance with one embodiment of the disclosure comprises selectively etching a dielectric layer and forming of a core region of a waveguide at a back-end of an integrated circuit. The dielectric layer is material deposited during a cycle of fabrication of the back-end of the integrated circuit. The method further includes depositing a material having a dielectric constant that is suitable to be the core region of the waveguide cladded by the dielectric layer over the dielectric layer and into the etched feature for the core region of the waveguide, and planarizing a surface of the material.