The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2014
Filed:
Nov. 26, 2008
Applicants:
Young Jong Lee, Sungnam, KR;
Jun Young Choi, Seoul, KR;
Saeng Hyun JO, Daejeon, KR;
Hyun Hwan Ahn, Sungnam, KR;
Suk-min Son, Daejeon, KR;
Sung IL Ahn, ChungCheongNam-do, KR;
Inventors:
Young Jong Lee, Sungnam, KR;
Jun Young Choi, Seoul, KR;
Saeng Hyun Jo, Daejeon, KR;
Hyun Hwan Ahn, Sungnam, KR;
Suk-Min Son, Daejeon, KR;
Sung Il Ahn, ChungCheongNam-do, KR;
Assignee:
Advanced Display Process Engineering Co., Ltd., Kyunggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.