The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2014

Filed:

Jul. 21, 2011
Applicants:

Hak-in Hwang, Seoul, KR;

Dae-sung Lee, Yongin-si, KR;

Kyu-sik Shin, Seoul, KR;

Inventors:

Hak-In Hwang, Seoul, KR;

Dae-Sung Lee, Yongin-si, KR;

Kyu-Sik Shin, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
Abstract

The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.


Find Patent Forward Citations

Hwang, Hak-In. (2014). Capacitive pressure sensor and method for manufacturing same (U.S. Patent No. 8754453). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8754453

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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