The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Jun. 08, 2011
Masaya Yukinobu, Ichikawa, JP;
Yuki Murayama, Ichikawa, JP;
Takahito Nagano, Ichikawa, JP;
Yoshihiro Otsuka, Ichikawa, JP;
Masaya Yukinobu, Ichikawa, JP;
Yuki Murayama, Ichikawa, JP;
Takahito Nagano, Ichikawa, JP;
Yoshihiro Otsuka, Ichikawa, JP;
Abstract
Provided is a method of manufacturing a metal oxide film to be formed through the following processes: a coating process of forming a coating film on a substrate by using a coating liquid for forming metal oxide film containing any of various organometallic compounds; a drying process of making the coating film into a dried coating film; and a heating process of forming an inorganic film from the dried coating film under an oxygen-containing atmosphere having a dew-point temperature equal to or lower than −10° C.