The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2014

Filed:

Sep. 05, 2012
Applicant:

Hironobu Furuhashi, Kawasaki, JP;

Inventor:

Hironobu Furuhashi, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01); H01L 23/528 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
Abstract

According to one embodiment, a method of fabricating a semiconductor memory device includes patterning a first memory cell layer and a first interconnect layer to form a first structure of a linear pattern in a first region and a second structure in a second region, forming a second interconnect layer and a second memory cell layer, and patterning the second memory cell layer and the second interconnect layer to form, in the first region, a third structure having a linear pattern and having a folded pattern immediately on the second structure. The method further includes removing the second memory cell layer and the second interconnect layer in the folded pattern, and the first memory cell layer of the second structure positioned under the folded pattern.


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