The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Jan. 10, 2012
Applicant:
Bradley David Sucher, Murphy, TX (US);
Inventor:
Bradley David Sucher, Murphy, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/322 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of nucleating and growing oxygen precipitates during a pad oxidation process. The nucleating is performed during in the oxidation furnace prior to the pad oxide growth. At least a portion of the growth of the oxygen precipitates occurs during the pad oxide growth. The oxygen precipitates are of sufficient concentration and size in lightly doped p-type wafers for effective gettering of heavy metals is deep submicron transistor, integrated circuit manufacturing flows.