The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
May. 22, 2012
Shawn M. Tanner, San Jose, CA (US);
Yufeng HU, Fremont, CA (US);
Sergei Sochava, Sunnyvale, CA (US);
Shawn M. Tanner, San Jose, CA (US);
Yufeng Hu, Fremont, CA (US);
Sergei Sochava, Sunnyvale, CA (US);
Western Digital (Fremont), LLC, Fremont, CA (US);
Abstract
Improved pump-probe testing methods and apparatuses for measuring the performance of a plasmon element at wafer level are provided. In one embodiment, the apparatus includes a light source configured to output a first light beam on a grating located at a first end of a waveguide, the waveguide being configured to couple energy of the first light beam to the plasmon element located at a second end of the waveguide, and an optical probe assembly positioned above a top surface of the wafer. The optical probe assembly is configured to direct a second light beam on an area of the wafer including the plasmon element and detect a portion of the second light beam reflected from the area.