The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Apr. 10, 2012
Koji Ichikawa, Osaka, JP;
Hiromu Sakamoto, Osaka, JP;
Yuichi Mukai, Osaka, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
The present invention provides a photoresist composition comprising a salt represented by the formula (I): wherein Rand Rindependently each represent a fluorine atom or a C1-C6 perfluoroalkyl group, Xrepresents a C1-C17 divalent saturated hydrocarbon group, etc., s1 represents 1 or 2, and t1 represents 0 or 1, with proviso that sum of s1 and t1 is 1 or 2, Rrepresents a C1-C12 saturated hydrocarbon group, etc., u1 represents an integer of 0 to 8, and (Z)represents an organic cation, a salt represented by the formula (II-0): wherein Rrepresents a C1-C24 hydrocarbon group etc., Xrepresents a C1-C6 alkanediyl group etc., and (Z)represents an organic cation, and a resin being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.