The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Oct. 02, 2012
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Hisashi Nishinaga, Saitama, JP;
Ikuo Hikima, Kawasaki, JP;
Mitsunori Toyoda, Taihaku-ku, JP;
Masahiro Nakagawa, Ageo, JP;
Tsuneyuki Hagiwara, Tokyo, JP;
Yasushi Mizuno, Saitama, JP;
Naonori Kita, Ageo, JP;
Osamu Tanitsu, Kumagaya, JP;
Nozomu Emura, Kumagaya, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.