The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Apr. 23, 2007
Hubert Benzel, Pliezhausen, DE;
Simon Armbruster, Gomaringen, DE;
Arnim Hoechst, Reutlingen, DE;
Christoph Schelling, Stuttgart, DE;
Ando Feyh, Tamm, DE;
Hubert Benzel, Pliezhausen, DE;
Simon Armbruster, Gomaringen, DE;
Arnim Hoechst, Reutlingen, DE;
Christoph Schelling, Stuttgart, DE;
Ando Feyh, Tamm, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A sensor, in particular for the spatially resolved detection, includes a substrate, at least one micropatterned sensor element having an electric characteristic whose value varies as a function of the temperature, and at least one diaphragm above a cavity, the sensor element being disposed on the underside of the at least one diaphragm, and the sensor element being contacted via connecting lines, which extend within, on top of or underneath the diaphragm. In particular, a plurality of sensor elements may be formed as diode pixels within a monocrystalline layer formed by epitaxy. Suspension springs, which accommodate the individual sensor elements in elastic and insulating fashion, may be formed within the diaphragm.