The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 10, 2014

Filed:

Mar. 14, 2013
Applicant:

SK Hynix Inc., Icheon-si, KR;

Inventors:

Ki Hong Lee, Suwon-si, KR;

Seung Ho Pyi, Seongnam-si, KR;

Hyun Soo Shon, Suwon-si, KR;

Assignee:

SK Hynix Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 29/775 (2006.01);
U.S. Cl.
CPC ...
H01L 29/792 (2013.01); H01L 29/775 (2013.01);
Abstract

A semiconductor device having reduced contact region area achieved at least in part by forming pad portions of the word lines using an asymmetric stair shape separately formed in first and second pad structures. Contact region area is reduced when compared with manufacturing processes known in the art. This leads to an increase in device integrity and a less complex manufacturing process.


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