The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Feb. 23, 2012
Takayuki Mogi, Sakado, JP;
Yoshinori Kuboshima, Sakado, JP;
Shintaro Higashi, Sakado, JP;
Kaoru Kikukawa, Sakado, JP;
Takayuki Mogi, Sakado, JP;
Yoshinori Kuboshima, Sakado, JP;
Shintaro Higashi, Sakado, JP;
Kaoru Kikukawa, Sakado, JP;
Kabushikikaisha Kojundokagaku Kenkyusho, Sakado-shi, JP;
Abstract
Provided are a novel europium compound which has a melting point of 180° C. or lower and can be stably supplied by bubbling in a chemical vapor deposition method or an atomic layer deposition method, a precursor for forming a europium-containing thin film based on the compound, and a method for forming a europium-containing thin film using this precursor. A europium-containing thin film is formed using bis(tetramethylmonoalkylcyclopentadienyl)europium as a precursor for forming a europium-containing thin film by a chemical vapor deposition method or anatomic layer deposition method.