The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 2014

Filed:

Jun. 27, 2013
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Bernhard Winkler, Regensburg, DE;

Florian Schoen, Altdorf, DE;

Mohsin Nawaz, Unterhaching, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/125 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02448 (2013.01); H03H 9/02244 (2013.01); H03H 9/02433 (2013.01);
Abstract

Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.


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