The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Feb. 24, 2011
Tomohiro Iwasaki, Shiga, JP;
Keiji Onishi, Osaka, JP;
Kunihiko Nakamura, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
In a MEMS device having a substrate, a sealing membrane, and a movable portionof beam and an electrodewhich have a region wherein they overlap with a gap in perpendicular to a substratesurface, a first cavityis on the side of the movable portionin the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode, of the first cavity, is positioned more inside than an inner surface b of a side wall B in contact with the electrode, of the second cavity, in the direction parallel to the substrate surface, such that the movable portiondoes not collide with the electrodewhen mechanical stress is applied from outside to the sealing membrane