The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Mar. 21, 2011
Volker Ziegler, Neubiberg, DE;
Bernhard Schönlinner, München, DE;
Ulrich Prechtel, Munich, DE;
Armin Stehle, Neu-Ulm, DE;
Volker Ziegler, Neubiberg, DE;
Bernhard Schönlinner, München, DE;
Ulrich Prechtel, Munich, DE;
Armin Stehle, Neu-Ulm, DE;
EADS Deutschland GmbH, Ottobrunn, DE;
Abstract
A high frequency-MEMS switch with a bendable switching element, whose one end is placed on a high resistivity substrate provided with an insulator, furthermore with a contact electrode to supply charge carriers to the substrate, wherein an electrical field can be produced to create an electrostatic bending force on the switching element between the switching element and the substrate, wherein at least one implantation zone is formed in the substrate, essentially directly beneath the insulator, the implantation zone is contacted with the contact electrode, which is located above the insulator, through an opening in the insulator, and also has ohmic contact with the substrate.