The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Sep. 23, 2010
Applicants:
Dan N. Harpold, Beltsville, MD (US);
Hasso B. Niemann, Columbia, MD (US);
Brian G. Jamieson, Severna Park, MD (US);
Bernard A. Lynch, San Antonio, TX (US);
Inventors:
Dan N. Harpold, Beltsville, MD (US);
Hasso B. Niemann, Columbia, MD (US);
Brian G. Jamieson, Severna Park, MD (US);
Bernard A. Lynch, San Antonio, TX (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/148 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems, methods and apparatus are provided through which in some embodiments a mass spectrometer micro-leak includes a number of channels fabricated by semiconductor processing tools and that includes a number of inlet holes that provide access to the channels.