The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Nov. 30, 2011
Young Min Jhon, Seoul, KR;
Young Tae Byun, Guri-Si, KR;
Chi Woong Jang, Yongin-Si, KR;
Kyeong Heon Kim, Seoul, KR;
Seok Lee, Seoul, KR;
Deok Ha Woo, Seoul, KR;
Sun Ho Kim, Seoul, KR;
Young Min Jhon, Seoul, KR;
Young Tae Byun, Guri-Si, KR;
Chi Woong Jang, Yongin-Si, KR;
Kyeong Heon Kim, Seoul, KR;
Seok Lee, Seoul, KR;
Deok Ha Woo, Seoul, KR;
Sun Ho Kim, Seoul, KR;
Korea Institute of Science and Technology, Seoul, KR;
Abstract
Provided are a method of controlling an amount of adsorbed carbon nanotubes (CNTs) and a method of fabricating a CNT device. The method of controlling an amount of adsorbed CNTs includes adsorbing CNT particles onto a semiconductor structure, and removing some of the adsorbed CNTs by performing an oxygen plasma treatment on the adsorbed CNT particles.