The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Mar. 08, 2012
Mayumi Yamaguchi, Kanagawa, JP;
Konami Izumi, Kanagawa, JP;
Mayumi Yamaguchi, Kanagawa, JP;
Konami Izumi, Kanagawa, JP;
Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;
Abstract
Without sacrificial layer etching, a microstructure and a micromachine are manufactured. A separation layeris formed over a substrate, and a layerto be a movable electrode is formed over the separation layer. At an interface of the separation layer, the layerto be a movable electrode is separated from the substrate. A layerto be a fixed electrode is formed over another substrate. The layerto be a movable electrode is fixed to the substratewith the spacer layerwhich is partially provided interposed therebetween, so that the layerto be a movable electrode and a layerto be a fixed electrode face each other.