The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Apr. 23, 2010
Michael Reising, Mömbris, DE;
Stefan Kempf, Alzenau, DE;
Georg Roth, Gelnhausen, DE;
Singulus Technologies AG, Kahl am Main, DE;
Abstract
A device for transporting a substrate () into a working area () which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element () transports a substrate () in the plane (XY) to a defined working area () of a chamber (). The transport element () has a deflectable sealing frame () which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame () has two opposing sealing surfaces () in the Z-direction. By pressing a closure element () against a first sealing surface () and thus pressing the second sealing surface () against a chamber wall (), the space of the working area () of the chamber () can be sealed.