The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2014
Filed:
Apr. 23, 2010
Michael Reising, Mömbris, DE;
Stefan Kempf, Alzenau, DE;
Michael Reising, Mömbris, DE;
Stefan Kempf, Alzenau, DE;
Singulus Technologies AG, Kahl am Main, DE;
Abstract
The invention describes a method and a device for introducing and removing substrates. Substrates () are transported into a lock () by a transport element (). A collection container () is located in the lock below the substrates () for collecting possible substrate fragments (). The substrates () are removed together with the collection container () and the lock cover () once the lock () has been flooded. The lock cover () and the collection container () form an almost closed box around the substrates (). After the substrates () have been replaced and the collection container () has been emptied, the new substrates () are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.