The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Oct. 28, 2009
Yoichiro Tsumura, Hiroshima, JP;
Takanori Inaba, Kanagawa, JP;
Yoichiro Tsumura, Hiroshima, JP;
Takanori Inaba, Kanagawa, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Fast Corporation, Kanagawa, JP;
Abstract
An alignment unit control apparatus according to the present invention includes: an imaging section configured to control cameras to image a plurality of regions on a surface of a substrate to generate a plurality of images; a region detecting section configured to select a detection region from the plurality of regions based on the plurality of images; and an aligning section configured to align the substrate based on an alignment image obtained by imaging a mark of the substrate in the detection region by one of the plurality of cameras. For this reason, the alignment unit control apparatus does not need to have another mechanism for the purpose of positioning the mark for alignment in the field of vision of the camera, and can more easily be manufactured, and a region of an alignment mark can be detected more easily.