The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Aug. 01, 2013
Applicant:
Sandisk 3d Llc, Milpitas, CA (US);
Inventors:
Jian Chen, Mountain View, CA (US);
Karen Chu Cruden, Pleasanton, CA (US);
Xiangfeng Duan, Mountain View, CA (US);
Chao Liu, San Jose, CA (US);
J. Wallace Parce, Palo Alto, CA (US);
Assignee:
SanDisk Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/3105 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3105 (2013.01); H01L 21/28008 (2013.01); Y10S 977/782 (2013.01); Y10S 977/845 (2013.01); Y10S 977/855 (2013.01);
Abstract
Methods for forming or patterning nanostructure arrays are provided. The methods involve formation of arrays on coatings comprising nanostructure association groups, formation of arrays in spin-on-dielectrics, solvent annealing after nanostructure deposition, patterning using resist, and/or use of devices that facilitate array formation. Related devices for forming nanostructure arrays are also provided, as are devices including nanostructure arrays (e.g., memory devices).