The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Mar. 31, 2009
Lauren Palmateer, San Francisco, CA (US);
William J. Cummings, San Francisco, CA (US);
Brian Gally, San Rafael, CA (US);
Clarence Chui, San Mateo, CA (US);
Manish Kothari, Cupertino, CA (US);
Lauren Palmateer, San Francisco, CA (US);
William J. Cummings, San Francisco, CA (US);
Brian Gally, San Rafael, CA (US);
Clarence Chui, San Mateo, CA (US);
Manish Kothari, Cupertino, CA (US);
Qualcomm Mems Technologies, Inc., San Diego, CA (US);
Abstract
Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.