The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Jan. 10, 2012
Seung-hun Kim, Hwaseong-si, KR;
Sang-joon Seo, Seoul, KR;
Jin-kwang Kim, Seoul, KR;
Jun-hyuk Cheon, Seoul, KR;
Seung-Hun Kim, Hwaseong-si, KR;
Sang-Joon Seo, Seoul, KR;
Jin-Kwang Kim, Seoul, KR;
Jun-Hyuk Cheon, Seoul, KR;
Samsung Display Co., Ltd., Gyeonggi-do, KR;
Abstract
An atomic layer deposition apparatus and a sealing method of an organic light emitting device using the same are disclosed. In one embodiment, the atomic layer deposition apparatus improves a structure of the purge gas injection nozzle so as to increase the exhaust efficiency of the purge gas in an atomic layer deposition process, which increases a speed of a purge process. As a result, it is possible to improve a deposition speed and a quality of a sealing film when a sealing process for sealing the organic light emitting device is implemented by using the atomic layer deposition.