The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Dec. 15, 2009
Kazuma Kurihara, Tsukuba, JP;
Takashi Nakano, Tsukuba, JP;
Takayuki Shima, Tsukuba, JP;
Junji Tominaga, Tsukuba, JP;
Kazuya Fujioka, Ibaraki, JP;
Ichiro Suehiro, Ibaraki, JP;
Kazuma Kurihara, Tsukuba, JP;
Takashi Nakano, Tsukuba, JP;
Takayuki Shima, Tsukuba, JP;
Junji Tominaga, Tsukuba, JP;
Kazuya Fujioka, Ibaraki, JP;
Ichiro Suehiro, Ibaraki, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Nitto Denko Corporation, Ibaraki-shi, JP;
Abstract
An etching resist has a first heat-generating layer, a second heat-generating layer, and a metal compound layer including a metallic oxynitride layer containing a metallic oxynitride. The first heat-generating layer, the metallic oxynitride layer, and the second heat-generating layer are directly or indirectly laminated such that the metallic oxynitride layer is positioned between the first heat-generating layer and the second heat-generating layer.