The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Nov. 01, 2013
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Hirotoshi Torii, Utsunomiya, JP;
Yusuke Tanaka, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B28B 7/00 (2006.01); G03F 1/00 (2012.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
The original of the present invention has a pattern to be transferred. For example, the original of the present invention is a mold for use is an imprint apparatus or a mask for use in an exposure apparatus. The original has a negative effective Poisson's ratio. Alternatively, the original has an effective Poisson's ratio smaller than that of a quartz glass plate.