The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Jan. 10, 2012
Takamichi Fujii, Kanagawa-ken, JP;
Takayuki Naono, Kanagawa-ken, JP;
Yoshikazu Hishinuma, Kanagawa-ken, JP;
Takamichi Fujii, Kanagawa-ken, JP;
Takayuki Naono, Kanagawa-ken, JP;
Yoshikazu Hishinuma, Kanagawa-ken, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.