Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus

Abstract

A drawing apparatus includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams and performs drawing on a substrate with the charged particle beams. The apparatus further includes a deflector array which includes a plurality of deflectors disposed for respective one or more charged particle beams, each of which aligning corresponding one or more charged particle beams between two of the plurality of charged particle optical elements, a plurality of devices configured to respectively apply a plurality of potentials to the deflector array, and a connector configured to connect each of a plurality of electrodes included in the deflector array to one of the plurality of devices and connect electrodes, to which an equal potential is applied, to each other. Number of devices included in the plurality of devices is less than number of electrodes included in the deflector array.