The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Jul. 29, 2011
Nicholas C. Barbi, Yardley, PA (US);
Filip Lopour, Brno, CZ;
Claudio Piemonte, Trento, IT;
Richard B. Mott, Ringoes, NJ (US);
Nicholas C. Barbi, Yardley, PA (US);
Filip Lopour, Brno, CZ;
Claudio Piemonte, Trento, IT;
Richard B. Mott, Ringoes, NJ (US);
Pulsetor, LLC, Ringoes, NJ (US);
Abstract
A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the electron column is coupled, and an electron detector. The electron detector includes one or more assemblies positioned within the electron column or the sample chamber, each of the assemblies including an SiPM and a scintillator directly connected face-to-face to an active light sensing surface of the SiPM without a light transporting device being positioned in between the scintillator and the SiPM.